![](https://au.feri.um.si/leoss/wp-content/uploads/sites/2/2023/02/materials-13-02147-g001-1024x567.png)
An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an RF generator. The ratio between Read More …