This paper describes a Fabry–Pérot sensor-based measuring system for measuring fluid composition in demanding industrial applications. The design of the sensor is based on a two-parametric sensor, which enables the simultaneous measurement of temperature and refractive index (RI). The system Read More …
Category: Micro machining with selective etching
Nano-strain resolution fiber-optic Fabry-Perot sensors compatible with moderate/low resolution VIS-NIR spectrometers
This paper reports on nano-strain resolution fiber-optic Fabry-Perot sensors produced by an improved selective etching method. The presented sensors exhibit high spectral sensitivity, low intrinsic temperature response, small size and mounting comparable to conventional Fiber Bragg gratings. Furthermore, the proposed Read More …
Resonant-opto-thermomechanical oscillator (ROTMO): a low-power, large displacement, high-frequency optically driven microactuator
A light-driven micromechanical oscillator is presented, which can be operated by a low optical power (in the mW, or even the µW range), can produce large mechanical displacements (>5–100 µm), and can be designed to operate at frequencies from sub-kHz up Read More …
All silica micro-fluidic flow injection sensor system for colorimetric chemical sensing
This paper presents a miniature, all-silica, flow-injection sensor. The sensor consists of an optical fiber-coupled microcell for spectral absorption measurements and a microfluidic reagent injection system. The proposed sensor operates in back reflection mode and, with its compact dimensions, (no Read More …
Optical micro-wire flow-velocity sensor
This paper presents a short response time, all-silica, gas-flow-velocity sensor. The active section of the sensor consists of a 16 µm diameter, highly optically absorbing micro-wire, which is heated remotely by a 980 nm light source. The heated microwire forms Read More …
Miniature fiber-optic Pitot tube sensor
This paper presents a miniature fiber-optic Pitot tube for gas flow rate measurements created at the tip of an optical fiber. The proposed all-fiber sensor employs two in-fiber Fabry-Perot cavities/chambers. The first chamber is arranged as a differential pressure sensor Read More …
Miniature all-fiber force sensor
A miniature all-fiber Fabry–Perot sensor for measurement of force is presented in this Letter. The sensor consists of a thin silica diaphragm created at the tip of the fiber. The central part of the diaphragm is extended into a silica Read More …
Optically controlled fiber-optic micro-gripper for sub-millimeter objects
A miniature, fully optically controlled, dielectric, opto-thermally actuated tweezer/micro-gripper that is suitable for the manipulation of small objects is presented. The tweezer/micro-gripper is formed at the tip of an optical fiber and utilizes a mid-power laser diode for its actuation. Read More …
Multiparameter miniature fiber-optic sensor : design and signal interrogation
Miniature, all-silica, fiber-optic sensors capable of independent measurement of at least two different parameters arepresented. Sensors were produced by a micromachining process based on the selective etching of specially designed phosphorous-doped optical fibers and an assembly-procedure that included fiber cleaving, Read More …
Miniature fiber-optic Fabry-Perot refractive index sensor for gas sensing with a resolution of 5×10−9 RIU
This paper presents a micro-machined, high-resolution refractive index sensor suitable for monitoring of small changes in the composition of gases. Experimentally demonstrated measurement resolution, induced by gas composition variation, proved to be in the range of 5×10-9 of a Refractive Read More …