This article presents a short-range fiber-optic quasi-distributed sensing device suitable for strain and temperature measurement. The sensing assembly consists of an fs laser inscribed reference mirror and a sensing array of equidistantly positioned mirrors. Utilization of the reference mirror and Read More …
Kategorija: Mikro obdelava
An all-fiber Fabry-Perot sensor for emulsion concentration measurements
This paper describes a Fabry–Pérot sensor-based measuring system for measuring fluid composition in demanding industrial applications. The design of the sensor is based on a two-parametric sensor, which enables the simultaneous measurement of temperature and refractive index (RI). The system Read More …
Nano-strain resolution fiber-optic Fabry-Perot sensors compatible with moderate/low resolution VIS-NIR spectrometers
This paper reports on nano-strain resolution fiber-optic Fabry-Perot sensors produced by an improved selective etching method. The presented sensors exhibit high spectral sensitivity, low intrinsic temperature response, small size and mounting comparable to conventional Fiber Bragg gratings. Furthermore, the proposed Read More …
Resonant-opto-thermomechanical oscillator (ROTMO): a low-power, large displacement, high-frequency optically driven microactuator
A light-driven micromechanical oscillator is presented, which can be operated by a low optical power (in the mW, or even the µW range), can produce large mechanical displacements (>5–100 µm), and can be designed to operate at frequencies from sub-kHz up Read More …
Distribution of the deposition rates in an industrial-size PECVD reactor using HMDSO precursor
The deposition rates of protective coatings resembling polydimethylsiloxane (PDMS) were measured with numerous sensors placed at different positions on the walls of a plasma-enhanced chemical vapor deposition (PECVD) reactor with a volume of approximately 5 m3. The plasma was maintained Read More …
Optical flow sensor based on the thermal time-of-flight measurement
This paper presents a dielectric, all-optical thermal time-of-flight fluid flow velocity sensor. The proposed sensor utilizes a sequence of three short sections of optical fibers, which are positioned in a direction perpendicular to the measured fluid flow. One of these Read More …
All silica micro-fluidic flow injection sensor system for colorimetric chemical sensing
This paper presents a miniature, all-silica, flow-injection sensor. The sensor consists of an optical fiber-coupled microcell for spectral absorption measurements and a microfluidic reagent injection system. The proposed sensor operates in back reflection mode and, with its compact dimensions, (no Read More …
Optical micro-wire flow-velocity sensor
This paper presents a short response time, all-silica, gas-flow-velocity sensor. The active section of the sensor consists of a 16 µm diameter, highly optically absorbing micro-wire, which is heated remotely by a 980 nm light source. The heated microwire forms Read More …
Miniature fiber-optic Pitot tube sensor
This paper presents a miniature fiber-optic Pitot tube for gas flow rate measurements created at the tip of an optical fiber. The proposed all-fiber sensor employs two in-fiber Fabry-Perot cavities/chambers. The first chamber is arranged as a differential pressure sensor Read More …
PECVD of hexamethyldisiloxane coatings using extremely asymmetric capacitive RF discharge
An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an RF generator. The ratio between Read More …