The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 \u03bcm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor are achieved by on-line tuning of the diaphragm thickness during the sensor fabrication process. Various sensor prototypes were fabricated, demonstrating pressure ranges of from 0 to 40 kPa to 0 to 1 MPa. The maximum achieved sensitivity was 1.1 rad\/40 kPa at 1550 nm, and a pressure resolution of 300 Pa was demonstrated in practice. The presented design and fabrication technique offers a means of simple and low-cost disposable pressure sensor production.<\/p>\n\n\n\n
https:\/\/www.osapublishing.org\/ol\/abstract.cfm?uri=ol-30-16-2071<\/a><\/p>\n","protected":false},"excerpt":{"rendered":" The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 \u03bcm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an Read More …<\/a><\/p>\n","protected":false},"author":7,"featured_media":905,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[27,14,11,19],"tags":[],"_links":{"self":[{"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/posts\/337"}],"collection":[{"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/comments?post=337"}],"version-history":[{"count":2,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/posts\/337\/revisions"}],"predecessor-version":[{"id":582,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/posts\/337\/revisions\/582"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/media\/905"}],"wp:attachment":[{"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/media?parent=337"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/categories?post=337"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/au.feri.um.si\/leoss\/wp-json\/wp\/v2\/tags?post=337"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}